JPH0388328U - - Google Patents
Info
- Publication number
- JPH0388328U JPH0388328U JP14963589U JP14963589U JPH0388328U JP H0388328 U JPH0388328 U JP H0388328U JP 14963589 U JP14963589 U JP 14963589U JP 14963589 U JP14963589 U JP 14963589U JP H0388328 U JPH0388328 U JP H0388328U
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- chemical
- chemical liquid
- vaporizer
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 claims description 21
- 239000007788 liquid Substances 0.000 claims description 14
- 239000007789 gas Substances 0.000 claims description 6
- 239000006200 vaporizer Substances 0.000 claims description 6
- 239000012159 carrier gas Substances 0.000 claims description 3
- 238000004381 surface treatment Methods 0.000 claims description 3
- 239000012071 phase Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 2
- 239000012808 vapor phase Substances 0.000 claims 2
- 230000008016 vaporization Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Nozzles (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14963589U JPH0536268Y2 (en]) | 1989-12-25 | 1989-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14963589U JPH0536268Y2 (en]) | 1989-12-25 | 1989-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0388328U true JPH0388328U (en]) | 1991-09-10 |
| JPH0536268Y2 JPH0536268Y2 (en]) | 1993-09-14 |
Family
ID=31696014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14963589U Expired - Lifetime JPH0536268Y2 (en]) | 1989-12-25 | 1989-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0536268Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001313252A (ja) * | 2000-02-22 | 2001-11-09 | Tokyo Electron Ltd | 処理装置 |
-
1989
- 1989-12-25 JP JP14963589U patent/JPH0536268Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001313252A (ja) * | 2000-02-22 | 2001-11-09 | Tokyo Electron Ltd | 処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0536268Y2 (en]) | 1993-09-14 |
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